论文标题
在光栅中对严格的耦合波接近p偏振光的分析
Analysis of the Rigorous Coupled Wave Approach for p-polarized light in gratings
论文作者
论文摘要
我们研究了二维严格的耦合波接近(RCWA)的收敛性能,用于p旋转的单色入射光。 RCWA是一种半分析数值方法,可广泛用于解决通过光栅散射的边界值问题。该方法需要沿空间变量沿光栅周期性方向的空间变量中的所有电磁场拟合量的扩展,并将相对介电常数作为傅立叶序列。在垂直于光栅周期性的方向上,该结构域被离散为薄片,并且实际的相对介电常数被近似所取代。选择近似相对介电常数,以便可以在不进一步近似的情况下计算每个切片中的麦克斯韦方程的解。因此,由于近似相对介电常数以及傅立叶级数的过度,存在误差。我们表明,RCWA用于用于扰动问题的盖尔金方案,然后我们使用有限元方法中的工具来证明该方法随着保留的傅立叶模式的增加而收敛,并且相对介电的近似值较大。数值示例说明了我们的分析,并提出了进一步的工作。
We study the convergence properties of the two-dimensional Rigorous Coupled Wave Approach (RCWA) for p-polarized monochromatic incident light. The RCWA is a semi-analytical numerical method that is widely used to solve the boundary-value problem of scattering by a grating. The approach requires the expansion of all electromagnetic field phasors and the relative permittivity as Fourier series in the spatial variable along the direction of the periodicity of the grating. In the direction perpendicular to the grating periodicity, the domain is discretized into thin slices and the actual relative permittivity is replaced by an approximation. The approximate relative permittivity is chosen so that the solution of the Maxwell equations in each slice can be computed without further approximation. Thus, there is error due to the approximate relative permittivity as well as the trucation of the Fourier series. We show that the RCWA embodies a Galerkin scheme for a perturbed problem, and then we use tools from the Finite Element Method to show that the method converges with increasing number of retained Fourier modes and finer approximations of the relative permittivity. Numerical examples illustrate our analysis, and suggest further work.