论文标题
SI的自组织离子束图案中的纳米级动力学：I。$^+$轰炸
Nanoscale dynamics during self-organized ion beam patterning of Si: I. Ar$^+$ Bombardment
论文作者
论文摘要
相干放牧的小角度X射线散射用于研究平均动力学和在65 $^{\ circ} $ polar Angle的自组织纳米图案中硅的自组织纳米图案的波动动力学。在早期，可以在线性理论的框架内理解表面行为。通过强度相关函数在动力学中观察到了从线性理论行为的过渡。它迅速发展为在短长度尺度上表现出拉伸的指数衰减，并在长度尺度上表现出压缩的指数衰减，与主要的结构长度尺度相对应 - 波动波长。相关时间在波纹长度尺度上也达到峰值。这种行为具有显着的相似性，但与De Gennes缩小现象的显着差异。总体而言，这种动态行为与非线性增长模型的模拟一致。
Coherent grazing-incidence small-angle X-ray scattering is used to investigate the average kinetics and the fluctuation dynamics during self-organized nanopatterning of silicon by Ar$^+$ bombardment at 65$^{\circ}$ polar angle. At early times, the surface behavior can be understood within the framework of linear theory. The transition away from the linear theory behavior is observed in the dynamics through the intensity correlation function. It quickly evolves to exhibit stretched exponential decay on short length scales and compressed exponential decay on length scales corresponding the dominant structural length scale - the ripple wavelength. The correlation times also peak strongly at the ripple length scale. This behavior has notable similarities but also significant differences with the phenomenon of de Gennes narrowing. Overall, this dynamics behavior is found to be consistent with simulations of a nonlinear growth model.
