论文标题

在氩气中站立和移动条纹的电子动力学

Electron kinetics in standing and moving striations in argon gas

论文作者

Levko, Dmitry

论文摘要

研究了直流和射频放电中移动和站立条纹的电子动力学。放电电流是使热电子电子碰撞可忽略不计,并且血浆电子成分的流体动力描述无效。因此,使用了一维杂交模型,该模型通过粒子方法对电子组件进行建模,而使用漂移 - 扩散近似描述了离子。可以获得电子传输在空间中非本地的。两次放电中的电子能量分布均具有非平衡性质,这是电离频率非线性的原因。但是,它们在两种排放中的动态都有很大的不同。也就是说,在直流电流中,分布函数受条纹通过的强烈调节,而在射频放电中,电子能量弛豫时间使电子分布函数不会在振荡电场上反应,但由有效的电场定义。

The electron kinetics in moving and standing striations in direct current and radio-frequency discharges is studied. The discharge current is such that the thermalizing electron-electron collisions are negligible and the hydrodynamic description of electron component of plasma is not valid. Therefore, the one-dimensional hybrid model is used which models the electron component by particle method, while the ions are described using the drift-diffusion approximation. It is obtained that the electron transport is non-local in space. The electron energy distribution in both discharges is of non-equilibrium nature which is responsible for the non-linearity of the ionization frequency. However, their dynamics in both discharges differs significantly. Namely, in the direct current discharge the distribution function is strongly modulated by the striations passage, while in the radio-frequency discharge the electron energy relaxation time is such that the electron distribution function does not react on the oscillating electric field but is defined by the effective electric field.

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