论文标题
片上掺杂的氯尼贝特微型酮激光器
On-chip erbium-doped lithium niobate microdisk lasers
论文作者
论文摘要
通过紫外线暴露，电感耦合的血浆反应离子蚀刻和化学机械抛光，在批处理中制造了掺杂的二氧化锂高Q微视腔。在1531.6 nm处被刺激的发射在狭窄的频段激光器的泵下，在974 nm的螺旋掺杂的niobate氯酸锂微型液腔中，阈值降低至400μW，转换效率为3.1 {\ times} 10^{ - 4}％，以实现3.1 {\ times} {\ times} { - 4}％的基础。
Erbium-doped lithium niobate high-Q microdisk cavities were fabricated in batches by UV exposure, inductively coupled plasma reactive ion etching and chemo-mechanical polishing. The stimulated emission at 1531.6 nm was observed under the pump of a narrow-band laser working at 974 nm in erbium-doped lithium niobate microdisk cavity with threshold down to 400 μW and a conversion efficiency of 3.1{\times}10^{-4} %, laying the foundation for the LNOI integrated light source research.
