论文标题
SOI-CMOS技术中使用双光谱硅LED的光学吸收传感
Optical absorption sensing with dual-spectrum silicon LEDs in SOI-CMOS technology
论文作者
论文摘要
硅P-N连接二极管在正向偏置的1120 nm附近发射低强度，宽光谱光，反向偏置（雪崩）的400-900 nm之间。我们首次使用标准的硅在绝缘子CMOS技术中设计的硅微LED实验实验实现了色素的光吸收感应。通过在运行的前进和雪崩模式下驾驶单个LED，我们将其电致光谱引导在可见和近红外（NIR）之间。然后，我们将LED的可见光和NIR光的垂直光学传输从LED通过相同的微滴射样品到垂直安装的离散硅光电二极管的垂直光传递。在光学偶联中，从颜色比中提取了在不同浓度下以不同浓度提取的胭脂红溶液的有效吸收系数。通过计算胭脂红的LED特异性摩尔吸收系数，我们估计浓度（0.040 mo/L），并使用商业分光光度计（0.030 mol/L）验证它。该传感器最大观察到的灵敏度为1260 /cm /mol L，这是向低成本CMOS集成的光学传感器迈出的重要一步，它是硅LED的，作为用于食品部门和植物 /人类健康的生化分析的光源。
Silicon p-n junction diodes emit low-intensity, broad-spectrum light near 1120 nm in forward bias and between 400-900 nm in reverse bias (avalanche). For the first time, we experimentally achieve optical absorption sensing of pigment in solution with silicon micro LEDs designed in a standard silicon-on-insulator CMOS technology. By driving a single LED in both forward and avalanche modes of operation, we steer its electroluminescent spectrum between visible and near-infrared (NIR). We then characterize the vertical optical transmission of both visible and NIR light from the LED through the same micro-droplet specimen to a vertically mounted discrete silicon photodiode. The effective absorption coefficient of carmine solution in glycerol at varying concentrations were extracted from the color ratio in optical coupling. By computing the LED-specific molar absorption coefficient of carmine, we estimate the concentration (0.040 mo/L) and validate the same with a commercial spectrophotometer (0.030 mol/L ). With a maximum observed sensitivity of 1260 /cm /mol L, the sensor is a significant step forward towards low-cost CMOS-integrated optical sensors with silicon LED as the light source intended for biochemical analyses in food sector and plant/human health.
